ETCH Rate and Thickness Measurements of Layered GaAs, AlAs and AlGaAs Structures Using a Laser Reflectance Technique

Grober, Louise HLouise HGroberMINGHWEI HONGGrober, RDRDGroberMannaerts, JPJPMannaertsFreund, RSRSFreund2018-09-102018-09-101994http://scholars.lib.ntu.edu.tw/handle/123456789/308663ETCH Rate and Thickness Measurements of Layered GaAs, AlAs and AlGaAs Structures Using a Laser Reflectance Techniquejournal article