Fabrication of free-space MOEM Device by CMOS Process

Cheng, Y.-C.Y.-C.ChengLee, C.-Y.C.-Y.LeeDai, C.-L.C.-L.DaiChen,W.-J.ChenChang, P.-Z.P.-Z.ChangChen, Ping-HeiPing-HeiChen2011-02-112018-06-282011-02-112018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/222378en-USFabrication of free-space MOEM Device by CMOS Processjournal article