Beam drift detection using a two-dimensional electron beam position monitor system for multiple-electron-beam

Sheng-Yung ChenKuen-Yu TsaiHoi-Tou NgChi-Hsiung FanTing-Han PeiChieh-Hsiung KuanYung-Yaw ChenYi-Hung KuoCheng-Ju WuJia-Yush YenKUEN-YU TSAI2018-09-102018-09-102010-06http://scholars.lib.ntu.edu.tw/handle/123456789/359315Beam drift detection using a two-dimensional electron beam position monitor system for multiple-electron-beam–direct-write lithographyconference paper