Wu, M.C.M.C.WuJUI-CHE TSAIPiyawattanametha, W.W.PiyawattanamethaPatterson, P.R.P.R.Patterson2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84929860324&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372484Optical MEMS and nanophotonicsbook10.1007/978-3-642-18293-8_102-s2.0-84929860324