Improved blue-green electroluminescence of metal-oxide-semiconductor diode fabricated on multirecipe Si-implanted and annealed SiO2/Si substrate

Lin, G.-R.G.-R.LinGONG-RU LIN2020-06-112020-06-112004https://scholars.lib.ntu.edu.tw/handle/123456789/500196[SDGs]SDG7Improved blue-green electroluminescence of metal-oxide-semiconductor diode fabricated on multirecipe Si-implanted and annealed SiO2/Si substratejournal article10.1063/1.17392832-s2.0-3142767726https://www.scopus.com/inward/record.uri?eid=2-s2.0-3142767726&doi=10.1063%2f1.1739283&partnerID=40&md5=47244c72539c5baa89688e7d999c21cf