顏家鈺臺灣大學：機械工程學研究所杜維謙Tu, Wei-ChienWei-ChienTu2007-11-282018-06-282007-11-282018-06-282007http://ntur.lib.ntu.edu.tw//handle/246246/61260本篇論文提出一種新式的光學掃瞄機構以及架設於上的伺服控制系統。此光學掃瞄機構採用壓電致動器做為掃瞄動作的驅動源，並利用壓電材料本身快速反應的特性搭配我們設計的伺服控制器以達到高速以及高解析度的掃瞄。經過我們創新的機構設計，此光學掃瞄機構可以達到±0.790的掃瞄範圍，而在掃瞄控制器方面，我們分別針對重複控制以及反覆學習控制兩種控制器在週期性參考輸入條件下做過誤差響應的比較，最後並整合兩種控制器的優點將之整合成為單一控制器，利用切換的方式得到最佳的掃瞄表現。This thesis proposes a novel optical scanning device for high speed large angle optical scanning. The traditional approaches include spinning prism and piezoelectric mirror. The mechanism based approach achieves large scanning angle but are slow in response; the piezoelectric drives are fast response, however, they have very limited strokes. The novel design in this thesis combines the strength of a smart mechanism with the piezo-drive to achieve high speed response with fairly large scanning angle. This thesis also looks into the iterative learning control (ILC) algorithm for mirror scanning. To avoid oscillation build up, this thesis introduces a switching algorithm to effectively suppress the initial low frequency oscillation. Due to the continuous scanning natural, the high frequency tracking error also tends to accumulate under prolonged ILC operation. This thesis investigates the alternative repetitive control (RC) and proposes a cascaded control to quickly suppress the initial low frequency oscillation and then to maintain a suppressed tracking error.Abstract Ⅰ Table of Contents Ⅴ List of Figures Ⅷ List of Tables XⅢ Chapter 1 Introduction 1 1.1 Motivation and contribution 1 1.2 Literature review 2 1.2.1 Review of the Piezoelectric Scanning Mechanism 2 1.2.2 Review of the Repetitive Control and Iterative Learning Control 3 1.3 Overview of this thesis 4 Chapter 2 Design of the Optical Scanning Mechanism 6 2.1 Servo Performance Specification 6 2.2 Initial design concept 6 2.3 Second version design concept 9 2.4 Third version design concept 11 2.5 Optical geometry 21 Chapter 3 Instrument and Environment of our Optical 26 3.1 Abstract of the scanning system 26 3.2 Multilayer piezoelectric actuator 27 3.2.1 Introduction of the piezoelectric actuator 27 3.2.2 Multilayer piezoelectric actuator 28 3.2.3 Multilayer piezoelectric actuator P840.40 29 3.3 Piezo Amplifier 31 3.4 LVDT 33 3.4.1 Introduction of LVDT 33 3.4.2 Principle of LVDT 34 3.4.3 LVDT E-115.21 35 3.5 Data Acquisition Card 38 3.5.1 Analog to Digital transformation card 38 3.5.2 Digital to Analog transformation card 39 3.5.3 The minimum detectable voltage range of the Input voltage 39 3.6 Limitation of the scanning system control loop 41 Chapter 4 System Identification 43 4.1 Method of system identification 43 4.2 Results of system identification 44 4.2.1 System frequency response (PZT1 with LVDT1) 44 4.2.2 System frequency response (PZT2 with LVDT2) 46 4.2.3 Curve fitting results 47 Chapter 5 The Servo Control Design for a Periodic Input Signal 51 5.1 Repetitive control 51 5.1.1 Introduction of the repetitive control 51 5.1.2 Repetitive control design Step 1 54 5.1.3 Repetitive control design Step 2 58 5.2 Modified Repetitive Control 60 5.3 Iterative learning control 63 Chapter 6 Simulation and Experiment Results 67 6.1 Introduction 67 6.2 Sine wave reference 68 6.2.1 PID 1Hz sine wave 68 6.2.2 RC 1Hz sine wave 71 6.2.3 ILC 1Hz sine wave 73 6.2.4 PID 30Hz sine wave 75 6.2.5 RC 30Hz sine wave 76 6.2.6 ILC 30Hz sine wave 78 6.3 Modified triangular wave reference 79 6.3.1 PID 1Hz modified triangular wave 79 6.3.2 RC 1Hz modified triangular wave 81 6.3.3 ILC 1Hz modified triangular wave 82 6.3.4 PID 30Hz modified triangular wave 83 6.3.5 RC 30Hz modified triangular wave 85 6.3.6 ILC 30Hz modified triangular wave 86 6.4 Integrated-Control 87 Chapter 7 Conclusion and future work 92 Reference： 945060154 bytesapplication/pdfen-US光學掃瞄機構壓電致動器重複控制反覆學習控制Optical Scanning SystemPiezoelectric ActuatorRepetitive ControlIterative Learning Controlthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/61260/1/ntu-96-R94522804-1.pdf