10 nm lines with 14 nm half pitch grating written in HSQ by electron beam direct write at 5 keV

Fu-Min WangSusumu OnoHsin-Hung SuKuen-Yu TsaiChieh-Hsiung KuanKUEN-YU TSAI2018-09-102018-09-102010-06http://scholars.lib.ntu.edu.tw/handle/123456789/35931710 nm lines with 14 nm half pitch grating written in HSQ by electron beam direct write at 5 keVconference paper