Vertical electrothermal actuator with separated metal and nitride structural layers

Tsai, J.-C.J.-C.TsaiLai, R.-J.R.-J.LaiYin, C.-Y.C.-Y.YinChen, D.-S.D.-S.ChenShen, C.-K.C.-K.ShenChang, Y.-T.Y.-T.ChangJUI-CHE TSAI2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-79960058626&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350104[SDGs]SDG7Vertical electrothermal actuator with separated metal and nitride structural layersjournal article10.1117/1.3100208