Ye, P.D.P.D.YeWilk, G.D.G.D.WilkKwo, J.J.KwoYang, B.B.YangGossmann, H.-J.L.H.-J.L.GossmannFrei, M.M.FreiChu, S.N.G.S.N.G.ChuMannaerts, J.P.J.P.MannaertsSergent, M.M.SergentMINGHWEI HONGNg, K.K.K.K.NgBude, J.J.Bude2019-12-272019-12-27200310.1109/LED.2003.812144https://scholars.lib.ntu.edu.tw/handle/123456789/443467GaAs MOSFET with oxide gate dielectric grown by atomic layer depositionother2-s2.0-0037766787