Acceleration sensitivity of small-gap capacitive micromechanical resonator oscillators

Kim, B.B.KimAkgul, M.M.AkgulLin, Y.Y.LinLi, W.-C.W.-C.LiRen, Z.Z.RenNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282010https://scholars.lib.ntu.edu.tw/handle/123456789/486409Acceleration sensitivity of small-gap capacitive micromechanical resonator oscillatorsconference paper10.1109/FREQ.2010.55563272-s2.0-77957867446https://www.scopus.com/inward/record.uri?eid=2-s2.0-77957867446&doi=10.1109%2fFREQ.2010.5556327&partnerID=40&md5=051bc3b1116b47208f5c1d5bd1909e5a