楊安之李昀軒林駿熙紀姮羽陳奕君康敦彥2021-03-292021-03-2920171015-8359http://dx.doi.org/10.29803/CE.201702_64(1).0006https://scholars.lib.ntu.edu.tw/handle/123456789/555605溶液法製備氧化鋁矽奈米管之低介電薄膜journal article10.29803/CE.201702_64(1).0006