Chou, J. S.J. S.ChouSah, Wen-JyhWen-JyhSahChang, T. C.T. C.ChangWang, J. C.J. C.Wang李嗣涔Lee, Si-ChenSi-ChenLee2009-02-042018-07-062009-02-042018-07-061992http://ntur.lib.ntu.edu.tw//handle/246246/120733en-USMicrocrystalline Silicon Deposited by Glow Discharge Decomposition of Heavily-Diluted Silanejournal article