Family-based scheduling rules of a sequence-dependent wafer fabrication system

CHING-CHIN CHERNLiu Y.-L.2020-02-122020-02-122003https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037325947&doi=10.1109%2fTSM.2002.807742&partnerID=40&md5=ba15611ec503d516ad2bb6fe54dac90ahttps://scholars.lib.ntu.edu.tw/handle/123456789/457985Family-based scheduling rules of a sequence-dependent wafer fabrication systemjournal article10.1109/TSM.2002.8077422-s2.0-0037325947