Coupled-domain nonlinear macromodels and pull-in characteristics with electro-thermal effect

Dept. of Mech. Eng., National Taiwan Univ.Cheng, Szu-YuanSzu-YuanChengYu, Che-ChiaChe-ChiaYuYAO-JOE YANG2007-04-192018-06-282007-04-192018-06-282003-06http://ntur.lib.ntu.edu.tw//handle/246246/200704191002968application/pdf285331 bytesapplication/pdfen-USCoupled-domain nonlinear macromodels and pull-in characteristics with electro-thermal effectjournal article10.1109/SENSOR.2003.1216962http://ntur.lib.ntu.edu.tw/bitstream/246246/200704191002968/1/01216962.pdf