High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materials

Lin, C.-W.C.-W.LinChen, Y.-J.Y.-J.ChenLee, C.-W.C.-W.LeeShih, W.-P.W.-P.ShihPEI-ZEN CHANGWEN-PIN SHIH2020-04-282020-04-282010https://scholars.lib.ntu.edu.tw/handle/123456789/486828High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materialsconference paper10.1109/MEMSYS.2010.54425262-s2.0-77952781434https://www.scopus.com/inward/record.uri?eid=2-s2.0-77952781434&doi=10.1109%2fMEMSYS.2010.5442526&partnerID=40&md5=a824f1de74c85fa8417a0c1f2f2e5a78