Polysilicon nanowire chemical sensor based on CMOS standard process

CHIH-TING LINHuang, C.-W.C.-W.HuangHsu, S.-C.S.-C.HsuLin, C.-T.C.-T.LinCHIH-TING LIN2018-09-102018-09-102008http://scholars.lib.ntu.edu.tw/handle/123456789/340652Polysilicon nanowire chemical sensor based on CMOS standard processjournal article10.1109/EDSSC.2008.4760705