Dopant diffusion and activation in silicon nanowires fabricated by ex situ doping: A correlative study via atom-probe tomography and scanning tunneling spectroscopy

Sun, Z.Z.SunHazut, O.O.HazutHuang, B.-C.B.-C.HuangYA-PING CHIUChang, C.-S.C.-S.ChangYerushalmi, R.R.YerushalmiLauhon, L.J.L.J.LauhonSeidman, D.N.D.N.Seidman2018-09-102018-09-102016http://www.scopus.com/inward/record.url?eid=2-s2.0-84978696553&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/396758Dopant diffusion and activation in silicon nanowires fabricated by ex situ doping: A correlative study via atom-probe tomography and scanning tunneling spectroscopyjournal article10.1021/acs.nanolett.6b016932-s2.0-84978696553WOS:000379794200076