F. D. LaiL. A. WangLON A. WANG2018-09-102018-09-102001-11http://scholars.lib.ntu.edu.tw/handle/123456789/294532Optical-Constant Tunable (ZrO<sub>2</sub>)<sub>x</sub>/(Cr<sub>2</sub>O<sub>3</sub>)<sub>y</sub>/(Al<sub>2</sub>O<sub>3</sub>)<sub>1-x-y</sub> Optical Superlattice for APSM in ArF Lithographyjournal article10.1116/1.14089512-s2.0-0035519484WOS:000173159900108