The Structural and Optical Properties of a-SiNx:H Prepared by Plasma Enhanced Chemical Vapor Deposition

Lin, Kuen-ChyungKuen-ChyungLin李嗣涔Lee, Si-ChenSi-ChenLee2009-02-042018-07-062009-02-042018-07-061993http://ntur.lib.ntu.edu.tw//handle/246246/120982en-USThe Structural and Optical Properties of a-SiNx:H Prepared by Plasma Enhanced Chemical Vapor Depositionjournal article