A high precision focus probe for the quality assessment of grating pitch

Chen, YejinYejinChenFan, K. C.K. C.FanLiu, YushengYushengLiuCheng, FangFangCheng2011-02-112018-06-282011-02-112018-06-28http://ntur.lib.ntu.edu.tw//handle/246246/222131en-USA high precision focus probe for the quality assessment of grating pitchjournal article