Chen, ArgonArgonChenGuo, Ruey-ShanRuey-ShanGuoYang, AlexAlexYangTseng, Chwan-LuChwan-LuTseng2019-05-132019-05-131998https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032296837&partnerID=40&md5=cba8b8deaacb685f728d8d20fe8757behttps://scholars.lib.ntu.edu.tw/handle/123456789/407846Integrated approach to semiconductor equipment monitoringjournal article2-s2.0-0032296837