Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS process

Chang, S.-C.S.-C.ChangDai, C.-L.C.-L.DaiChiou, J.-H.J.-H.ChiouPEI-ZEN CHANG2020-04-282020-04-282001https://scholars.lib.ntu.edu.tw/handle/123456789/486858Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS processconference paper10.1117/12.4366192-s2.0-0035171402https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035171402&doi=10.1117%2f12.436619&partnerID=40&md5=d810b060bd37d9e0af716f17dede7bdf