Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying

Lin, Y.Y.LinLi, W.-C.W.-C.LiKim, B.B.KimLin, Y.-W.Y.-W.LinRen, Z.Z.RenNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282009https://scholars.lib.ntu.edu.tw/handle/123456789/486413Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arrayingconference paper10.1109/FREQ.2009.51681422-s2.0-70449490688https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449490688&doi=10.1109%2fFREQ.2009.5168142&partnerID=40&md5=db49d5a25bb197cf35b7bf3a7fa73a89