盧信嘉Lu, Hsin-Chia臺灣大學:電子工程學研究所林天斌Lin, Tian-BinTian-BinLin2010-07-142018-07-102010-07-142018-07-102008U0001-1508200823294900http://ntur.lib.ntu.edu.tw//handle/246246/189112本論文的第一部份將介紹直線型電感的電感值計算方法，由於在RF被動電路的設計過程中，電感是眾多被動元件中影響整體效能最多的元件，因此，如何精準並且迅速的計算出電感值將是這個領域中最值得的研究的主題之一。為了準確的計算出電感值，我們描述了直線型電感的各項電氣特性並考慮了各項損耗機制，也基於此建構了一個電感等效電路，並利用部分元素等效電路(Partial element equivalent circuit)的原理，開發了一個可以快速地計算出電感的各種電氣特性的模擬計算引擎。二部份將展示在單一電感與耦合電感中套用圖型式接地屏蔽（Patterned ground shield）所產生的效果。由於在電感跟基板之間插入一片圖型式接地屏蔽理論上可以削弱電感與基板之間的電耦合與磁耦合因而提升電感的效能，基於此理論，本論文將對各種型態的圖型式接地屏蔽在單一電感與耦合電感上所產生的效果做特性上的研究。本論文在單一電感上套用了五種不同型態的圖型式接地屏蔽，另外在耦合電感上也套用了六種不同的型態。The first part of this thesis shows the method of calculating the inductance of a rectilinear inductor, since in RF design, on-chip inductor is one of the critical components that dominates the overall performance of the RF devices, thus how to calculate the inductance accurately and immediately becomes an important research topic in this field. In order to calculate inductance as precise as possible, the electrical characteristics of an inductor are carefully analyzed and the loss mechanisms are taken into account. With the proper inductor equivalent circuit and partial element equivalent circuit (PEEC) method, we developed a simulation engine which is capable to predict the inductance and Q-value of an inductor.he second part of this thesis presents the effects on spiral inductors and coupled inductors with the presence of a patterned ground shield (PGS). Inserting a PGS between inductor and substrate eliminates both electric and magnetic couplings to the substrate, and thus enhances the performance of the inductors. Therefore, we would like to study the characteristics of applying various PGS shapes on the spiral inductors and further on the coupled inductors. In this thesis, five PGS structures are used on spiral inductor and six PGS structures are used on the coupled inductors.Chapter 1 Introduction 1.1 Motivation 1.2 Literature review 2.3 The introduction of LTCC technology 4.3.1 Advantages of LTCC technology 6.3.2 Disadvantages of LTCC technology 7.4 The introduction of BCB technology 7.4.1 Advantages of BCB technology 8.4.2 Disadvantages of BCB technology 8.5 Organization of this thesis 9hapter 2 Inductance Extraction Methodology 11.1 Rectilinear inductors 11.2 Inductance 13.3 Quality factor 14.4 Loss mechanisms 15.4.1 Metal loss 15.4.2 Substrate loss 17.4.3 Substrate coupling 18.5 Electrical model and extraction of an inductor 18.6 Calculation of electrical parameters 21.6.1 Partial element equivalent circuit 22.6.2 Meshing strategy 23.6.3 Formulas for calculating inductance 25.6.4 Parasitic capacitance calculation 26.6.5 Resistance calculation 28.7 Solving the equivalent circuit 31.8 Implementation details 33hapter 3 Experimental Results of Inductance Calculation 39.1 Process parameters 39.2 Inductors under test 40.3 Experimental results 42hapter 4 Coupled Inductors with PGS 51.1 Coupled inductors 51.1.1 Electrical model of the coupled inductors 53.1.2 Extraction of the coupled inductors 54.2 Patterned ground shield 55.3 Various structures of PGS 57hapter 5 Simulation Results of Inductors with PGS 63.1 Spiral inductor with various PGS shapes 63.1.1 Process parameters and inductor specification 63.1.2 Layouts and simulation results 64.2 Coupled inductors with various PGS shapes 68.2.1 Process parameters and inductor specification 68.2.2 Layouts and simulation results 69hapter 6 Conclusion 77eference 793575533 bytesapplication/pdfen-US部分元素等效電路圖型式接地屏蔽耦合電感Partial element equivalent circuitpatterned ground shieldcoupled inductorsthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/189112/1/ntu-97-R95943155-1.pdf