Hsieh T.H.Jywe W.Y.Chen S.L.Liu C.H.Huang H.L.Wen-Yuh Jywe2022-05-242022-05-242011https://www.scopus.com/inward/record.uri?eid=2-s2.0-79958050050&doi=10.1063%2f1.3585021&partnerID=40&md5=d8d4865ecf2802526a2d6e9a791c8d18https://scholars.lib.ntu.edu.tw/handle/123456789/611930A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz. ? 2011 American Institute of Physics.High resolutionMeasurement timePrecision stageSix degrees of freedomVibrometers[SDGs]SDG16journal article10.1063/1.35850212-s2.0-79958050050