Chen, P.-J.P.-J.ChenKuo, W.-C.W.-C.KuoLi, W.W.LiYang, Y.-J.Y.-J.YangTai, Y.-C.Y.-C.TaiYAO-JOE YANG2020-01-132020-01-132008https://scholars.lib.ntu.edu.tw/handle/123456789/448542Q-enhanced fold-and-bond MEMS inductorsconference paper10.1109/NEMS.2008.44844612-s2.0-50249144126https://www.scopus.com/inward/record.uri?eid=2-s2.0-50249144126&doi=10.1109%2fNEMS.2008.4484461&partnerID=40&md5=c2c928e8046e5bb68e2fa5c3a8df4b5f