Fabrication of free-space MOEM component by CMOS process

Cheng, Y.-C.Y.-C.ChengLee, C.-Y.C.-Y.LeeDai, C.-L.C.-L.DaiChen, W.-J.W.-J.ChenChang, P.-Z.P.-Z.ChangChen, P.-H.P.-H.ChenPING-HEI CHEN2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-2942739180&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/307892Fabrication of free-space MOEM component by CMOS processjournal article