Yang, Y.-J.Y.-J.YangKamon, M.M.KamonRabinovich, V.L.V.L.RabinovichGhaddar, C.C.GhaddarDeshpande, M.M.DeshpandeGreiner, K.K.GreinerGilbert, J.R.J.R.GilbertYAO-JOE YANG2020-01-132020-01-132001https://scholars.lib.ntu.edu.tw/handle/123456789/448560Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-modelsjournal article10.1016/B978-008043944-0/50933-12-s2.0-0034998906https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034998906&doi=10.1016%2fB978-008043944-0%2f50933-1&partnerID=40&md5=fcfa23be8b3934e6b5f1969624d77071