Design of a long range nano-scale resolution mechanism

Chang, Shuo HungShuo HungChangLee, Jen BonJen BonLee2012-10-312018-06-282012-10-312018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/244318en-USDesign of a long range nano-scale resolution mechanismjournal article10.1631/jzus.A1000029http://ntur.lib.ntu.edu.tw/bitstream/246246/244318/-1/410.pdf