Chen, A.A.ChenARGON CHENJAKEY BLUEChen, ArgonArgonChen2020-03-022020-03-0220090894-6507, 1558-2345https://scholars.lib.ntu.edu.tw/handle/123456789/467319Recipe-Independent Indicator for Tool Health Diagnosis and Predictive Maintenancejournal article10.1109/TSM.2009.2028215http://ieeexplore.ieee.org/document/5170100/