WEN-PIN SHIH2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-27544437492&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/315045Buckeld-type valves integrated by parylene micro-tubesconference paper