Ziv, A. R.A. R.ZivKing, B. V.B. V.King林聖賢Tsong, I. S. T.I. S. T.TsongLin, Sheng-HsienSheng-HsienLin2009-01-202018-07-102009-01-202018-07-101983http://ntur.lib.ntu.edu.tw//handle/246246/103135en-USKinetic Energy Distributions of Sputtered Particles in Non-Cascade Sputtering Processesbook