High tuning range and low pull-in voltage micromachined tunable capacitor filled with liquid crystal

Lin, C.-W.C.-W.LinChen, Y.-J.Y.-J.ChenLee, C.-W.C.-W.LeeShih, W.-P.W.-P.ShihChang, P.-Z.P.-Z.Chang2013-04-112018-06-282013-04-112018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/257133en-USHigh tuning range and low pull-in voltage micromachined tunable capacitor filled with liquid crystalconference paper