Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Jian, R.-S.R.-S.JianWang, T.-Y.T.-Y.WangSong, L.-Y.L.-Y.SongKuo, C.-Y.C.-Y.KuoTian, W.-C.W.-C.TianLo, E.-W.E.-W.LoLu, C.-J.C.-J.LuWEI-CHENG TIAN2020-06-112020-06-112015https://scholars.lib.ntu.edu.tw/handle/123456789/497743Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroomjournal article10.1016/j.buildenv.2015.08.0232-s2.0-84940520661https://www.scopus.com/inward/record.uri?eid=2-s2.0-84940520661&doi=10.1016%2fj.buildenv.2015.08.023&partnerID=40&md5=73ff117dafe7d4e65594c7242fcd09ed