Low Dielectric Constant Silica Films Prepared by a Templating Method

Ting, Chih-YuanChih-YuanTingWu, Chen-AnChen-AnWuWan, Ben-ZuBen-ZuWanWu, Wen-FaWen-FaWu2008-12-172018-06-282008-12-172018-06-282003http://ntur.lib.ntu.edu.tw//handle/246246/92227application/pdf801828 bytesapplication/pdfen-USLow Dielectric Constant Silica Films Prepared by a Templating Methodjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/92227/1/21.pdf