Manufacturing and characterization of a thermoelectric energy harvester using the CMOS-MEMS technology

Peng, S.-W.S.-W.PengShih, P.-J.P.-J.ShihDai, C.-L.C.-L.DaiPO-JEN SHIH2020-02-262020-02-262015https://scholars.lib.ntu.edu.tw/handle/123456789/464353Manufacturing and characterization of a thermoelectric energy harvester using the CMOS-MEMS technologyjournal article10.3390/mi61014392-s2.0-84946404169https://www.scopus.com/inward/record.uri?eid=2-s2.0-84946404169&doi=10.3390%2fmi6101439&partnerID=40&md5=9e5fce99d7ca5e7d3a218a64b9f02541