Compact 1×2 MEMS optical switches with low-actuation voltage

Hsieh, H.-T.H.-T.HsiehGUO-DUNG JOHN SU2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-33645695259&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/323793Compact 1×2 MEMS optical switches with low-actuation voltageconference paper10.1117/12.638426