Lin, C.C.C.C.LinYoung, H.T.H.T.YoungZhan, J.P.J.P.Zhan2011-02-112018-06-282011-02-112018-06-282008http://ntur.lib.ntu.edu.tw//handle/246246/222958en-USAn Experimental Investigation on Silicon Wafer Thinning Processjournal article