Ma, H. K.H. K.MaHou, B. R.B. R.HouWu, H. Y.H. Y.WuLin, C. Y.C. Y.LinGao, J. J.J. J.GaoKou, M. C.M. C.Kou2011-02-112018-06-282011-02-112018-06-282008-05http://ntur.lib.ntu.edu.tw//handle/246246/222332en-US[SDGs]SDG7Development and Application of A Diaphragm Micro-pump with Piezoelectric Devicejournal article10.1007/s00542-007-0462-6