Cheng, YYChengCheng, Y.Y.ChengShewa, B. -Y.B. -Y.ShewaShew, BYBYShewChyu, M. K.M. K.ChyuChyu, MKMKChyuChen, PHPHChenChen, P. H.P. H.Chen2008-10-282018-06-282008-10-282018-06-282001http://ntur.lib.ntu.edu.tw//handle/246246/85721application/pdf239206 bytesapplication/pdfen-USUltra-deep LIGA process and its applicationsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/85721/1/28.pdf