Fabrication and Evaluation of a MEMS Piezoelectric Bimorph Generator for Vibration Energy Harvesting

Lee, B.S.B.S.LeeLin, S.C.S.C.LinWEN-JONG WU2012-10-312018-06-282012-10-312018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/244429en-US[SDGs]SDG7Fabrication and Evaluation of a MEMS Piezoelectric Bimorph Generator for Vibration Energy Harvestingjournal article10.1017/S172771910000469X2-s2.0-78650423947http://ntur.lib.ntu.edu.tw/bitstream/246246/244429/-1/64.pdf