黃光裕臺灣大學:機械工程學研究所梁國贊Leong, Kuok-ChanKuok-ChanLeong2010-06-302018-06-282010-06-302018-06-282009U0001-0607200916231700http://ntur.lib.ntu.edu.tw//handle/246246/187196本論文以全像式讀取頭作為原子力顯微鏡的量測單元，簡化了原來量測單元的架構。目前主流的光槓桿式原子力顯微鏡不但體積大，且在調整時花耗大量時間，而已量產的全像式讀取頭擁有穩定的性能，能準確量測微小位移變化。以全像式讀取頭作為量測單元能縮短調整時間，並提升原子力顯微鏡的緊緻度及設計彈性度。透過光學分析軟體，求出適用的準直鏡與物鏡組合，並由光電二極體接收到的雷射通量得知懸臂位移對輸出電壓的關係(即聚焦誤差訊號，又稱S曲線)。實驗驗證則利用高確準度的壓電定位器及雷射干涉儀，量測出全像式讀取頭之實際S曲線。並利用給定傾角的反射鏡，量測出有傾角對S曲線的影響。最後將全像式讀取頭整合入原子力顯微鏡系統中，以特定原子力顯微鏡用校正樣品驗證其性能與可行性。結果可清楚量得20nm的大台階，並可測得2nm小台階的位移變化。This thesis proposes using a holographic pick-up head to build up the measurement unit of the atomic force microscope (AFM), so as to simplify its configuration. The ordinary AFM, which applies the optical lever method, has a large volume and costs much time in tuning. By contrast, the holographic pick-up head, which is under mass production, has a stable performance and can be used to measure the displacement precisely. Using a holographic pick-up head to build up the measurement unit of the AFM can shorten the tuning time and improve the size and the freedom of design. A workable assembly of collimating lens and objective lens is decided by the optical simulation software. Also, the relationship between the output voltage and the displacement of the cantilever beam of the probe can be obtained by the radiant flux shot on the photo-diodes. (The output voltage is also called focus error signal, and the relationship curve is called S-curve.) The practical S-curve is obtained by using a piezo linear stage and a laser interferometer which can acquire the precise displacement. In addition, the tilted mirror moved along perpendicular direction is used to find the influence of tilt-angle mirror to the S-curve. In the last part of the thesis, three given samples are measured by a whole holographic AFM configuration, and the performance and the feasibility are verified. The results indicate that the configuration can measure the 20nm-height and the 2nm-height step of a calibration grating.口試委員會審定書 I謝 II文摘要 III文摘要 IV錄 V目錄 VII目錄 VIII號表 X一章 緒論 1.1 研究背景與動機 1.2 文獻回顧 3.2.1 原子力顯微鏡的發展 3.2.2 光碟讀取頭量測應用的發展 5.3 研究目標 8.4 內容簡介 9二章 全像式原子力顯微鏡原理與架構介紹 10.1 探針子系統 12.2 全像讀取頭量測子系統 14.3 訊號擷取子系統 17.4 掃瞄平台子系統 18三章 全像讀取頭量測子系統之光學分析 20.1 球面透鏡和光柵對光斑成像之影響分析 21.2 透鏡對光斑成像之影響分析 29.3 全像讀取頭之電壓-位移曲線分析 32四章 全像式原子力顯微鏡之性能測試 36.1 實驗測試台介紹 37.2 反射鏡面垂直位移與S曲線之關係 40.3 反射鏡面角度變化對S曲線之影響 41.4 整體性能測試 46五章 結論與未來展望 51考文獻 52錄 554438830 bytesapplication/pdfen-US原子力顯微鏡全像式讀取頭位移量測聚焦誤差訊號atomic force microscopeholographic pick-up headdisplacement measurementfocus error signalthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/187196/1/ntu-98-R96522606-1.pdf