A Precision Piezodriven Micropositioner Mechanism with Large Travel Range

Chang, S. H.S. H.ChangDu, B. C.B. C.Du2008-10-282018-06-282008-10-282018-06-281998http://ntur.lib.ntu.edu.tw//handle/246246/85679application/pdf208790 bytesapplication/pdfen-USA Precision Piezodriven Micropositioner Mechanism with Large Travel Rangejournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/85679/1/13.pdf