Hysteresis compensation and adaptive controller design for a piezoceramic actuator system in atomic force microscopy

PING-LANG YEN2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84863841703&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/369985Hysteresis compensation and adaptive controller design for a piezoceramic actuator system in atomic force microscopyjournal article10.1002/asjc.453