Dai, C.-L.C.-L.DaiPEI-ZEN CHANG2020-04-282020-04-281999https://scholars.lib.ntu.edu.tw/handle/123456789/486863A CMOS surface micromachined pressure sensorjournal article10.1080/02533839.1999.96704752-s2.0-0032688979https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032688979&doi=10.1080%2f02533839.1999.9670475&partnerID=40&md5=3e6e543ae0542f9c0ac8856974202b7d