Fabrication and Characterization of Aluminum Oxide/Chromium Oxide Optical Superlattice for APSM at 193nm Wavelength

F. D. LaiL. A. WangLON A. WANG2018-09-102018-09-102002-04http://scholars.lib.ntu.edu.tw/handle/123456789/299268Fabrication and Characterization of Aluminum Oxide/Chromium Oxide Optical Superlattice for APSM at 193nm Wavelengthjournal article10.1016/S0040-6090(02)00137-22-s2.0-0037197337WOS:000176019900009