Modeling, scheduling, and prediction for wafer fabrication: queueing colored Petri-net and GA based approach

Dept. of Comput. Sci. & Inf. Eng., National Taiwan Univ.Huang, An-ChihAn-ChihHuangFu, Li-ChenLi-ChenFuLin, Ming-HungMing-HungLinLI-CHEN FU2007-04-192018-07-052007-04-192018-07-052002-05http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021159application/pdf709881 bytesapplication/pdfen-USModeling, scheduling, and prediction for wafer fabrication: queueing colored Petri-net and GA based approachjournal article10.1109/ROBOT.2002.1013717http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021159/1/01013717.pdf