2006-08-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/705956摘要：本子計畫著重在多軸電子束微影(Electron Beam Projection Lithography, EPL)系統之振動控制。因為EPL 系統高解析&#64001;之性能要求，其對於振動控制的要求也相對地提高。除了重新設計機體之外，減振控制最有效的方式就是使用減振平台。本計劃將分別就被動式、主動式以及半主動式減振平台逐一討&#63809;其架構、&#63851;&#63849;選定以及控制器設計。首先就被動式減振平台而言，傳統的彈簧－阻尼的組合可以針對系統之振動頻&#63841;作減振設計。而一個新發明的機械網&#63799;元件－慣質(Inerter)－的使用，則可以讓我們對特定頻&#63841;的振動作&#63745;有效的控制。再則我們將針對主動式減振平台做設計，我們設計之目標是同時考慮系統之&#63847;確定性以及性能，採用μ控制設計。最後我們則是結合主動式及被動式控制設計之優點，建構一個半主動式減振平台，並且採用新發展的控制設計法則－擾動響應分解(Disturbance Response Decoupling)－將&#63789;自於桌面震動以及地面震動&#63864;<br> Abstract: This project focuses on the vibration control of the Electron Beam Projection Lithography (EPL) system. Due to the resolution of an EBL system, the requirements for system vibration suppression are relatively high and need more elegant control strategies. Apart from redesigning the EPL model, the most efficient way of system vibration suppression control is to use an anti-vibration table to isolate the disturbances from the system. It is noted that the disturbances come from both of the base and the table, which consequently resulting in the conflict criteria of the suspension stiffness and will make the control problem rather complicated. This project will start from the passive suspension control of the system by specifying the frequency range in which the system resonance occurs. It is shown that the traditional spring-damper passive suspension system provides a first order controller design to reduce the system disturbances. Furthermore, we note that a newly developed mechanical network element, called Inerter, can be applied to the passive suspension system to suppress the disturbances even more at specified frequency range by forming anti-resonance on the frequency responses. Relative to the passive control, we also plan to investigate the active vibration control of the EPL system by pneumatic actuators. Considering the system uncertainties, H∞ robust control design will be applied to achieve robust performance properties. Combining the merits of both passive and active systems, a semi-active structure is constructed to adopt a new controller design strategies, namely disturbance response decoupling, to decouple the effects of the base and table disturbances, making the system “soft” to the base disturbances and “stiff” to the table disturbances. The performance of those designs will be evaluated by experiment data.多軸電子束微影振動控制Electron Beam Projection LithographyEPLvibration control