Depth profiling the electronic structures at HfO2/Si interface grown by molecular beam epitaxy

Lay, TSTSLayChang, SCSCChangDin, GJGJDinYeh, CCCCYehHung, Wei-HsiuWei-HsiuHungLee, WGWGLeeKwo, JJKwoMINGHWEI HONGothers2018-09-102018-09-102005http://scholars.lib.ntu.edu.tw/handle/123456789/315728Depth profiling the electronic structures at HfO2/Si interface grown by molecular beam epitaxyjournal article