Petri-net and GA based approach to modeling, scheduling, and performance evaluation for wafer fabrication

Dept. of Comput. Sci. & Inf. Eng., National Taiwan Univ.Chen, Jyh-HorngJyh-HorngChenFu, Li-ChenLi-ChenFuLI-CHEN FU2007-04-192018-07-052007-04-192018-07-052000-04http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021509application/pdf626641 bytesapplication/pdfen-USPetri-net and GA based approach to modeling, scheduling, and performance evaluation for wafer fabricationconference paper10.1109/ROBOT.2000.845245http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021509/1/00845245.pdf